Control of abnormal edge growth in selective area MOVPE of InP

Journal of Crystal Growth

Volumn 287, Issue 2, 2006, Pages 668-672

  Sugiyama, M ^a,b   Waki, N ^a,b   Nobumori, Y ^c   Song, H ^a,b   Nakano, T ^a,b   Arakawa, T ^c   Nakano, Y ^b,d   Shimogaki, Y ^a,b  

^a UNIVERSITY OF TOKYO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c YOKOHAMA NATIONAL UNIVERSITY   (Japan)

^d UNIVERSITY OF TOKYO   (Japan)

Author keywords

A1. Abnormal growth; A1. Growth models; A3. Metalorganic vapor phase epitaxy; A3. Selective epitaxy; B1. InP

Indexed keywords

CRYSTAL GROWTH; DIFFUSION; EPITAXIAL GROWTH; FEATURE EXTRACTION; GROWTH (MATERIALS); METALLORGANIC VAPOR PHASE EPITAXY;

ABNORMAL GROWTH; GROWTH MODELS; INP; SELECTIVE EPITAXY;

CRYSTALS;

EID: 30344478846     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.10.096     Document Type: Conference Paper

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