Proton Beam Writing of Passive Polymer Optical Waveguides

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5347, Issue , 2004, Pages 160-169

  Sum, T C ^a,c   Bettiol, A A ^a   Venugopal Rao, S ^a   Van Kan, J A ^a   Ramam, A ^b   Watt, F ^a  

^a Centre for Ion Beam Applications   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^c NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Direct write; Polymer; Prism coupler; Proton beam writing; Refractive index; SU 8; Waveguide

Indexed keywords

DIRECT-WRITE; PRISM COUPLER; PROTON BEAM WRITING; SU-8;

ASPECT RATIO; LASER BEAM EFFECTS; PRISMS; PROTONS; RAPID PROTOTYPING; REACTIVE ION ETCHING; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY;

OPTICAL WAVEGUIDES;

EID: 2142791785     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524083     Document Type: Conference Paper

References (20)

1. R. Chen, "Integration goes plastic," Oe magazine - The monthly publication of SPIE: The International Society for Optical Engineering 2(11), pp. 24-26, 2002.
2. D. M. Ruck, S. Brunner, K. Tinschert, and W. F. X. Frank, "Production of buried waveguides in pmma by high energy ion implantation," Nucl. Instrum. Methods Phys. Res. B 106, pp. 447-451, 95.
3. W. Hong, H. J. Woo, H. W. Choi, Y. S. Kim, and G. D. Kim, "Optical property modification of pmma by ion-beam implantation," Appl. Surf. Sci. 169-170, pp. 428-432, 2001.
4. M. Hikita, Y. Shuto, M. Amano, R. Yoshimura, S. Tomaru, and H. Kozawaguchi, "Optical intensity modulation in a vertically stacked coupler incorporating electro-optic polymer," Appl. Phys. Lett. 63, pp. 1161-1163, 1993.
5. W. Wang, D. Chen, H. R. Fetterman, Y. Shi, W. H. Steier, and L. R. Dalton, "Travelling wave electro-optic phase modulator using cross-linked nonlinear optical polymer," Appl. Phys. Lett. 65, pp. 929-931, 1994.
6. M. B. J. Diemeer, F. M. M. Suyten, E. S. Trommel, A. McDonach, J. M. Copeland, L. W. Jenneskens, and W. H. G. Horsthuis, "Photoinduced channel waveguide formation in nonlinear optical polymers," Electron. Lett. 26, pp. 379-380, 1990.
7. Y. Shi, W. H. Steier, L. Yu, M. Chen, and L. R. Dalton, "Large stable photoinduced refractive index change in a nonlinear optical polyester polymer with disperse red side groups," Appl. Phys. Lett. 58, pp. 1131-1133, 1991.
8. g polymer," Appl. Phys. Lett. 71, pp. 1924-1926, 1997.
9. W. H. Wong, J. Zhou, and E. Y. B. Pun, "Low-loss polymeric optical waveguides using electron-beam direct writing," Appl. Phys. Lett. 78, pp. 2110-2112, 2001.
10. F. Watt, J. A. van Kan, and T. Osipowicz, "Three-dimesional microfabrication using maskless irradiation with mev ion beams: Proton beam micromachining," MRS Bull. 25(2), pp. 33-38, 2000.
11. T. C. Sum, A. A. Bettiol, H. L. Seng, I. Rajta, J. A. van Kan, and F. Watt, "Proton beam writing of passive waveguides in pmma," Nucl. Instrum. Methods Phys. Res. B 210, pp. 266-271, 2003.
12. J. A. van Kan, A. A. Bettiol, B. S. Wee, T. C. Sum, S. M. Tang, and F. Watt, "Proton beam micromachining: a new tool for precision three-dimensional microstructures," Sens. Actuators A 92, pp. 370-374, 2001.
13. G. W. Grime and F. Watt, "Focusing high-energy ion beams," in Principles and Application of High-Energy Ion Microbeams, F. Watt and G. W. Grime, eds., pp. 79-112, IOP Publishing Ltd, England, 1987.
14. J. M. Shaw, J. D. Gelorme, N. C. LaBianca, W. E. Conley, and S. J. Holmes, "Negative photoresists for optical lithography," IBM J. Res. Develop. 41(1/2), pp. 81-94, 1997.
15. R. Ulrich and R. Torge, "Measurement of thin film parameters with a prism coupler," Appl. Opt. 12(12), pp. 2901-2908, 1973.
16. F. Ladouceur and J. D. Love, Silica-based Buried Channel Waveguides and Devices, Chapman & Hall, London, 1996.
17. H. Nishihara, M. Haruna, and T. Suhara, Optical Integrated Circuits, McGraw-Hill Book Company, New York, 1989.
18. F. Watt, J. A. van Kan, I. Rajta, A. A. Bettiol, T. F. Choo, M. B. H. Breese, and T. Osipowicz, "The national university of Singapore high energy ion nano-probe facility: Performance tests," Nucl. Instrum. Methods Phys. Res. B (210), pp. 14-20, 2003.
19. A. A. Bettiol, J. A. van Kan, T. C. Sum, and F. Watt, "A labview™-based scanning and control system for proton beam micromachining," Nucl. Instrum. Methods Phys. Res. B (181), pp. 49-53, 2001.
20. T. C. Sum, A. A. Bettiol, J. A. van Kan, F. Watt, E. Y. B. Pun, and K. K. Tung, "Proton beam writing of low-loss polymer optical waveguides," Appl. Phys. Lett. 83(9), pp. 1707-1709, 2003.