Three-dimensional microfabrication using maskless irradiation with MeV ion beams: proton-beam micromachining

MRS Bulletin

Volumn 25, Issue 2, 2000, Pages 33-38

  Watt, Frank ^a   Van Kan, Jeroen A ^a   Osipowicz, Thomas ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ION BEAMS; LIGHT; MICROELECTROMECHANICAL DEVICES; PROTONS; THREE DIMENSIONAL; ULTRAVIOLET RADIATION; X RAYS;

MICROFABRICATION; PROTON BEAM MICROMACHINING;

ION BOMBARDMENT;

EID: 0034140066     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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