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Volumn 26, Issue 12, 2005, Pages 864-866

InGaP/InGaAs metal-oxide-semiconductor pseudomorphic high-electron-mobility transistor with a liquid-phase-oxidized InGaP as gate dielectric

Author keywords

Gate dielectric; InGaP; Liquid phase; MOS; Pseudomorphic high electron mobility transistor (PHEMT)

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC BREAKDOWN; GATES (TRANSISTOR); LEAKAGE CURRENTS; MOSFET DEVICES; OXIDATION; POWER ELECTRONICS; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DEVICE STRUCTURES;

EID: 29244475081     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2005.859629     Document Type: Article
Times cited : (26)

References (16)
  • 1
    • 21544482706 scopus 로고
    • "Determination of valence and conduction-band discontinuities at the (Ga,In) P/GaAs heterojunction by C-V profiling"
    • M. A. Rao, E. J. Caine, H. Kroemer, S. I. Long, and D. I. Babic, "Determination of valence and conduction-band discontinuities at the (Ga,In) P/GaAs heterojunction by C-V profiling," J. Appl. Phys., vol. 61, pp. 643-649, 1987.
    • (1987) J. Appl. Phys. , vol.61 , pp. 643-649
    • Rao, M.A.1    Caine, E.J.2    Kroemer, H.3    Long, S.I.4    Babic, D.I.5
  • 4
    • 0031166727 scopus 로고    scopus 로고
    • 0.49P/GaAs airbridge gate MISFET's grown by gas-source MBE"
    • Jun
    • 0.49P/GaAs airbridge gate MISFET's grown by gas-source MBE," IEEE Trans. Electron Devices, vol. 44, no. 6, pp. 921-929, Jun. 1997.
    • (1997) IEEE Trans. Electron Devices , vol.44 , Issue.6 , pp. 921-929
    • Lin, Y.S.1    Lu, S.S.2    Wang, Y.J.3
  • 6
    • 0032131616 scopus 로고    scopus 로고
    • "Near room temperature selective oxidation on GaAs using photoresist as a mask"
    • H. H. Wang, Y. H. Wang, and M. P. Houng, "Near room temperature selective oxidation on GaAs using photoresist as a mask," Jpn. J. Appl. Phys., vol. 37, pp. L988-L990, 1998.
    • (1998) Jpn. J. Appl. Phys. , vol.37
    • Wang, H.H.1    Wang, Y.H.2    Houng, M.P.3
  • 7
    • 0032682354 scopus 로고    scopus 로고
    • "Effects of pH values on the kinetics of liquid phase chemical enhanced oxidation of GaAs"
    • H. H. Wang, J. Y. Wu, Y. H. Wang, and M. P. Houng, "Effects of pH values on the kinetics of liquid phase chemical enhanced oxidation of GaAs," J. Electrochem. Soc., vol. 146, pp. 2328-2332, 1999.
    • (1999) J. Electrochem. Soc. , vol.146 , pp. 2328-2332
    • Wang, H.H.1    Wu, J.Y.2    Wang, Y.H.3    Houng, M.P.4
  • 8
    • 4644332251 scopus 로고    scopus 로고
    • "Liquid phase chemical enhanced oxidation on AlGaAs and its application"
    • K. W. Lee, Y. H. Wang, and M. P. Houng, "Liquid phase chemical enhanced oxidation on AlGaAs and its application," Jpn. J. Appl. Phys., vol. 43, pp. 4087-4091, 2004.
    • (2004) Jpn. J. Appl. Phys. , vol.43 , pp. 4087-4091
    • Lee, K.W.1    Wang, Y.H.2    Houng, M.P.3
  • 13
    • 0039565280 scopus 로고    scopus 로고
    • "Natural oxides on air-exposed and chemically treated InGaP surfaces grown by metalorganic vapor phase epitaxy"
    • T. Hashizume and T. Saitoh, "Natural oxides on air-exposed and chemically treated InGaP surfaces grown by metalorganic vapor phase epitaxy," Appl. Phys. Lett., vol. 78, pp. 2318-2320, 2001.
    • (2001) Appl. Phys. Lett. , vol.78 , pp. 2318-2320
    • Hashizume, T.1    Saitoh, T.2
  • 14
    • 0036650709 scopus 로고    scopus 로고
    • "AlGaN/GaN metal oxide semiconductor heterostructure field-effect transistor based on a liquid phase deposited oxide"
    • D. W. Chou, K. W. Lee, J. J. Huang, P. W. Sze, H. R. Wu, Y. H. Wang, M. P. Houng, S. J. Chang, and Y. K. Su, "AlGaN/GaN metal oxide semiconductor heterostructure field-effect transistor based on a liquid phase deposited oxide," Jpn. J. Appl. Phys., vol. 41, pp. L748-L750, 2002.
    • (2002) Jpn. J. Appl. Phys. , vol.41
    • Chou, D.W.1    Lee, K.W.2    Huang, J.J.3    Sze, P.W.4    Wu, H.R.5    Wang, Y.H.6    Houng, M.P.7    Chang, S.J.8    Su, Y.K.9
  • 15
    • 0026927886 scopus 로고
    • "Mesa-sidewall gate leakage in InAlAs/InGaAs heterostructure field-effect transistors"
    • Sep
    • S. R. Bahl, M. H. Leary, and J. A. D. Alamo, "Mesa-sidewall gate leakage in InAlAs/InGaAs heterostructure field-effect transistors," IEEE Trans. Electron Devices, vol. 39, no. 9, pp. 2037-2043, Sep. 1992.
    • (1992) IEEE Trans. Electron Devices , vol.39 , Issue.9 , pp. 2037-2043
    • Bahl, S.R.1    Leary, M.H.2    Alamo, J.A.D.3
  • 16
    • 14944342691 scopus 로고    scopus 로고
    • "Demonstration of AlGaN/GaN metal-oxide-semiconductor high-electron-mobility transistors with silicon-oxy-nitride as the gate insulator"
    • K. Balachander, S. Arulkumaran, T. Egawa, Y. Sano, and K. Baskar, "Demonstration of AlGaN/GaN metal-oxide-semiconductor high-electron-mobility transistors with silicon-oxy-nitride as the gate insulator," Mat. Sci. Eng. B, vol. 119, pp. 36-40, 2005.
    • (2005) Mat. Sci. Eng. B , vol.119 , pp. 36-40
    • Balachander, K.1    Arulkumaran, S.2    Egawa, T.3    Sano, Y.4    Baskar, K.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.