Effects of pH values on the kinetics of liquid-phase chemical-enhanced oxidation of GaAs

Journal of the Electrochemical Society

Volumn 146, Issue 6, 1999, Pages 2328-2332

  Wang, Hwei Heng ^a   Wu, Jau Yi ^a   Wang, Yeong Her ^a   Houng, Mau Phon ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

OXIDATION; PH EFFECTS; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING FILMS; SEMICONDUCTING GALLIUM ARSENIDE;

LIQUID PHASE CHEMICAL ENHANCED OXIDATION; OXIDATION KINETICS;

REACTION KINETICS;

EID: 0032682354     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1391935     Document Type: Article

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