Electrodeposition of cobalt based alloys for MEMS applications

Transactions of the Institute of Metal Finishing

Volumn 83, Issue 5, 2005, Pages 248-254

  Gomez E ^a   Pellicer, E ^a   Valles E ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Co Mo alloy; Co Ni alloy; Co Ni Mo alloy; Electrodeposition; MEMS

Indexed keywords

COBALT ALLOYS; FEEDBACK; MAGNETIC FIELDS; MAGNETIC PROPERTIES; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION;

CO-MO ALLOYS; CO-NI ALLOYS; CO-NI-MO ALLOYS; MEMS;

ELECTRODEPOSITION;

EID: 29144533327     PISSN: 00202967     EISSN: None     Source Type: Journal    
DOI: 10.1179/002029605X70469     Document Type: Article

References (28)

1. D. Niarchos: Sensors Actuators A, 2003, 109, 166.
2. W. P. Taylor, O. Brand and M. G. Allen: IEEE J. Microelectromech. Syst., 1998, 7, 181.
3. J. Y. Park and M. G. Allen: J. Micromech. Microeng., 1998, 8, 307.
4. L. K. Lagorce, O. Brand and M. G. Allen: IEEE J. Microelectromech. Syst., 1999, 8, 2.
5. T.-S. Chin: J. Mag. Mag, Mater., 2000, 209, 75.
6. N. Damean, B. A. Parviz, J. Ng Lee, T. Odom and G. M. Whitesides: J. Micromech. Microeng., 2005, 15, 29.
7. S. Guan and B. J. Nelson: Sensors Actuators A. 2005, 118, 307.
8. C. H. Ahn and M. G. Allen: J. Microelectromech. Syst., 1993, 2, 15.
9. W. Wang, Z. Yao, J. C. Chen and J. Fang: J. Micromech. Microeng., 2004, 14, 1321.
10. J.-W. Choi, T. M. Liakopoulos and C. H. Ahn: Bionsens. Bioelectron., 2001, 16, 409.
11. B. H. Stark and K. Najafi: J. Microelectromech. Syst., 2004, 13, 147.
12. D. P. Arnold, F. Cros, I. Zana, D. R. Veazi and M. G. Allen: J. Microelectromech. Syst., 2004, 13, 791.
13. B. Lö'chel, A. Maciossek, H. J. Quenzer and B. Wagner: J. Electrochem. Soc., 1996, 143, 237.
14. W. P. Taylor, M. Schneider, H. Baltes and M. G. Allen: Proc. Int. Conf. on 'Solid-State Sensors and Actuators, Transducers '97'. Chicago, 1445-1448, 1997.
15. L. T. Romankiw: Electrochim. Acta, 1997, 42, 2985.
16. S. D. Leith and D. T. Schwartz: J. Microelectromech. Syst., 1999, 8, 384.
17. E. Gómez, J. Ramirez and E. Vallés: J. Appl. Electrochem., 1998, 28, 71.
18. E. Gómez and E. Vallés, J. Appl. Electrochem., 1999, 29, 805.
19. A. Brenner: Electrodeposition of Alloys, Vol. 1-2; 1963, New York, Academic Press.
20. E. Gómez, E. Pellicer and E. Vallés: J. Electroanal. Chem., 2003, 556, 137.
21. E. Gómez, E. Pellicer and E. Vallés: J. Electroanal. Chem., 2004, 568, 29.
22. M. Duch, J. Esteve, E. Gómez, R. Pérez-Castillejos and E. Vallés: J. Electrochem. Soc., 2002, 149, C201.
23. M. Duch, J. Esteve, E. Gómez, R. Pérez-Castillejos and E. Vallés: J. Micromech. Microeng., 2002, 12, 400.
24. E. Gómez, E. Pellicer and E. Vallés: Electrochem. Commun., 2004, 6, 853.
25. E. Gómez, E. Pellicer and E. Vallés, Surf. Coat. Technol., 2005, 197, 238.
26. W. Z. Friend: Corrosion of Nickel and Nickel Alloys, 95-135, 248; 1980, New York, Wiley-Interscience.
27. E. Gómez, E. Pellicer and E. Vallés: Electrochem. Commun., 2005, 7, 275.
28. E. Gómez, E. Pellicer and E. Vallés: J. Electroanal. Chem., 2005, 580, 222.