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Volumn 6, Issue 8, 2004, Pages 853-859
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Microstructures of soft-magnetic cobalt-molybdenum alloy obtained by electrodeposition on seed layer/silicon substrates
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Author keywords
AFM; Cobalt molybdenum alloy; Electrodeposition; MEMS; White light interferometry
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CRACKS;
ELECTRODEPOSITION;
MICROSTRUCTURE;
PH EFFECTS;
SILICON;
COBALT-MOLYBDENUM ALLOYS;
MASK DEVICES;
COBALT ALLOYS;
ALLOY;
CITRATE TRISODIUM;
COBALT;
COBALT SULFATE;
MOLYBDATE SODIUM;
MOLYBDENUM;
SACCHARIN;
SILICON;
ARTICLE;
ATOMIC FORCE MICROSCOPY;
CHEMICAL STRUCTURE;
ELECTROCHEMISTRY;
INTERFEROMETRY;
MAGNETISM;
MATERIAL COATING;
TEMPERATURE;
THICKNESS;
WHITE LIGHT;
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EID: 3242793354
PISSN: 13882481
EISSN: None
Source Type: Journal
DOI: 10.1016/j.elecom.2004.06.011 Document Type: Article |
Times cited : (33)
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References (17)
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