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Journal of Micromechanics and Microengineering

Volumn 12, Issue 4, 2002, Pages 400-405

Electrodeposited Co-Ni alloys for MEMS

(5) Duch, M a Esteve, J a Gomez E b Perez Castillejos R a Valles E b

a UNIVERSITAT AUTÒNOMA DE BARCELONA (Spain)

b UNIVERSITY OF BARCELONA (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CHARACTERIZATION; COERCIVE FORCE; ELECTROCHEMISTRY; ELECTRODEPOSITION; ETCHING; MAGNETIC ANISOTROPY; MAGNETIZATION; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY; SILICON;

ADHERENCE; BRILLIANT ASPECT; ELECTROCHEMICAL CHARACTERIZATION; MAGNETIC CHARACTERIZATION; TETRAMETHYL AMMONIUM HYDROXIDE;

COPPER ALLOYS;

EID: 0036646683 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/12/4/309 Document Type: Article

Times cited : (59)

References (18)

1
- 0009765582
- (Gyf sur Ivette, France)
- (1999) MME'99 Proc.
- Muralt, P.¹

2
- 0009790379
- (Munich, Germany 1582)
- (2001) Transducers'01 Proc.
- Zou, J.¹ Chen, J.² Liu, C.³

3
- 0029431075
- (1995) J. Microelectromech. Syst. , vol.4 , pp. 162
- Judy, J.W.¹ Muller, R.S.² Zappe, H.H.³

4
- 0026882942
- (1992) Sensors Actuators A , vol.33 , pp. 207
- Busch-Vishniac, I.J.¹

5
- 0030231116
- (1996) J. Micromech. Microeng. , vol.6 , pp. 337
- Nami, Z.¹ Anh, C.H.² Allen, M.G.³

6
- 0026853721
- (1992) Sensors Actuators A , vol.32 , pp. 598
- Wagner, B.¹ Benecke, W.² Engelmann, G.³ Simon, J.⁴

7
- 0009788620
- (San Diego, CA)
- (1996) MEMS'96 Proc.
- Lagorce, L.K.¹ Allen, M.G.²

8
- 0030245514
- (1996) IEEE Trans. Magn. , vol.32 , pp. 5154
- Liakopoulos, T.M.¹ Zhang, W.² Ahn, C.H.³

9
- 0032560161
- (1998) Nature , vol.392 , pp. 796
- Osaka, T.¹ Takai, M.² Hayashi, K.³ Ohashi, K.⁴ Saito, M.⁵ Yamada, K.⁶

10
- 0009809331
- (Copenhagen, Denmark, 915)
- (2000) Eurosensors 14th Proc.
- Rasmussen, F.E.¹ Ravnkilde, J.T.² Tang, P.T.³ Hansen, O.⁴ Bouwstra, S.⁵

11
- 0009809575
- (Interlaken, Switzerland)
- (2001) MEMS'01 Proc.
- Ruan, M.¹ Shen, J.² Wheeler, C.B.³

12
- 0030261552
- (1996) J. Electrochem. Soc. , vol.143 , pp. 3343
- Löchel, B.¹ Maciossek, A.²

13
- 0042885410
- (1999) J. Appl. Electrochem. , vol.29 , pp. 805
- Gómez, E.¹ Vallés, E.²

14
- 0036530383
- Development and characterization of Co-Ni alloys for microsystems applications
- (2002) J. Electrochem. Soc. , vol.149
- Duch, M.¹ Esteve, J.² Gómez, E.³ Pérez-Castillejos, R.⁴ Vallés, E.⁵

15
- 0009806569
- Ferromagnetic micromechanical magnetometers
- (Munich, 2001)
- (2001) Transducers'01
- Yang, H.H.¹ Myung, N.V.² Yee, J.³ Park, D.-Y.⁴ Yoo, B.-Y.⁵ Schwartz, M.⁶ Nobe, K.⁷ Judy, J.W.⁸

16
- 0031696302
- (1998) J. Appl. Electrochem. , vol.28 , pp. 71
- Gómez, E.¹ Ramírez, J.² Vallés, E.³

17
- 17744409087
- (1993) Sensors Actuators A , vol.37-38 , pp. 737-743
- Merlos, A.¹ Acero, M.² Bao, M.H.³ Bausells, J.⁴ Esteve, J.⁵

18
- 0030082323
- (1996) J. Electrochem. Soc. , vol.143 , pp. 544
- Shenoy, R.V.¹ Datta, M.²

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