Fabrication of hard magnetic microarrays by electroless codeposition for MEMS actuators

Sensors and Actuators, A: Physical

Volumn 118, Issue 2, 2005, Pages 307-312

  Guan, Shan ^a,c   Nelson, Bradley J ^b  

^a UNIVERSITY OF MINNESOTA   (United States)

^b ETH ZURICH   (Switzerland)

^c Kodak Versamark Inc   (United States)

Author keywords

Electroless codeposition; Magnetic microarrays; MEMS actuators

Indexed keywords

ELECTROLESS PLATING; ELECTROLYTES; MAGNETIC DEVICES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MORPHOLOGY; NICKEL COMPOUNDS; OPTIMIZATION; OXIDATION; PERMANENT MAGNETS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; THIN FILMS; TORQUE CONTROL;

HYDROGENATION DECOMPOSITION DESORPTION RECOMBINATION (HDDR); MAGNETIC MICROARRAYS; MEMS ACTUATORS; MICROMOTORS;

ACTUATORS;

EID: 13244253970     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.08.020     Document Type: Article

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