A modified cellular automata algorithm for the simulation of boundary advancement in deposition topography simulation

Journal of Micromechanics and Microengineering

Volumn 16, Issue 1, 2006, Pages 1-8

  Huang, Qing An ^a   Zhou, Zai Fa ^a   Li, Wei Hua ^a   Xu, Da Wei ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ANISOTROPY; BOUNDARY CONDITIONS; COMPUTER SIMULATION; DEPOSITION; TWO DIMENSIONAL;

ANISOTROPIC DEPOSITION PROCESSES; CELLULAR AUTOMATA ALGORITHMS; DEPOSITION RATES; SIMULATION PROFILES;

AUTOMATA THEORY;

EID: 29144520673     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/1/001     Document Type: Article

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