Simulation of the Bosch process with a string-cell hybrid method

Journal of Micromechanics and Microengineering

Volumn 14, Issue 7, 2004, Pages 851-858

  Zhou, Rongchun ^a   Zhang, Haixia ^a   Hao, Yilong ^a   Wang, Yangyuan ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; EXTRACTION; INDUCTIVELY COUPLED PLASMA; MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; PARAMETER ESTIMATION; POLYMERIZATION; SILICON WAFERS; TRENCHING;

BOSCH PROCESS; CELL STRUCTURE; PARAMETER EXTRACTION; STRING-CELL HYBRID METHOD;

ETCHING;

EID: 3142734901     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/7/003     Document Type: Article

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