Design-based approach to planarization in multilayer surface micromachining

Journal of Micromechanics and Microengineering

Volumn 9, Issue 4, 1999, Pages 294-299

  Mali, Raji Krishnamoorthy ^a,c   Bifano, Thomas ^a   Koester, David ^b  

^a BOSTON UNIVERSITY   (United States)

^b Cronos Integrated Microsystems Inc   (United States)

^c Standard MEM'S Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MULTILAYERS; SURFACE TOPOGRAPHY; THIN FILMS;

DESIGN-BASED PLANARIZATION;

MICROMACHINING;

EID: 0033350191     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/4/302     Document Type: Article

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