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Volumn 125, Issue 2, 2006, Pages 553-564

Flexible fabrication of three-dimensional multi-layered microstructures using a scanning laser system

Author keywords

Scanning laser system; Single layered cantilever beam; Three dimensional manufacturing; Three dimensional microstructures

Indexed keywords

CANTILEVER BEAMS; CONTROLLABILITY; EMBEDDED SYSTEMS; LASER PULSES; LAYERED MANUFACTURING; SCANNING;

EID: 29144475402     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.07.001     Document Type: Article
Times cited : (24)

References (27)
  • 1
    • 0037340912 scopus 로고    scopus 로고
    • Investigation of gray-scale technology for large area 3D silicon MEMS structures
    • C.M. Waits, A. Modafe, and R. Ghodssi Investigation of gray-scale technology for large area 3D silicon MEMS structures J. Micromech. Microeng. 13 2003 170 177
    • (2003) J. Micromech. Microeng. , vol.13 , pp. 170-177
    • Waits, C.M.1    Modafe, A.2    Ghodssi, R.3
  • 3
    • 0442280362 scopus 로고    scopus 로고
    • 3D microfabrication with inclined/rotated UV lithography
    • M. Han, W. Lee, S.K. Lee, and S.S. Lee 3D microfabrication with inclined/rotated UV lithography Sens. Actuators A 111 2004 14 20
    • (2004) Sens. Actuators A , vol.111 , pp. 14-20
    • Han, M.1    Lee, W.2    Lee, S.K.3    Lee, S.S.4
  • 4
    • 0029639810 scopus 로고
    • Laser-driven movement of three-dimensional microstructures generated by laser rapid prototyping
    • O. Lehmann, and M. Stuke Laser-driven movement of three-dimensional microstructures generated by laser rapid prototyping Science 270 1995 1644 1646
    • (1995) Science , vol.270 , pp. 1644-1646
    • Lehmann, O.1    Stuke, M.2
  • 5
    • 0031043478 scopus 로고    scopus 로고
    • Laser rapid prototyping of photonic band-gap microstructures
    • M.C. Wanke, O. Lehmann, K. Müller, Q. Wen, and M. Stuke Laser rapid prototyping of photonic band-gap microstructures Science 275 1997 1284 1286
    • (1997) Science , vol.275 , pp. 1284-1286
    • Wanke, M.C.1    Lehmann, O.2    Müller, K.3    Wen, Q.4    Stuke, M.5
  • 7
    • 0033149623 scopus 로고    scopus 로고
    • Photo-electroforming: 3D geometry and materials flexibility in a MEMS fabrication process
    • C.-C. Tsao, and E. Sachs Photo-electroforming: 3D geometry and materials flexibility in a MEMS fabrication process J. Microelectromech. Syst. 8 1999 161 171
    • (1999) J. Microelectromech. Syst. , vol.8 , pp. 161-171
    • Tsao, C.-C.1    Sachs, E.2
  • 8
    • 29144507223 scopus 로고    scopus 로고
    • http://www.tecan.co.uk
  • 10
    • 0027989015 scopus 로고
    • Three dimensional micro integrated fluid systems (MIFS) fabricated by stereo lithography
    • K. Ikuta, K. Hirowatari, and T. Ogata Three dimensional micro integrated fluid systems (MIFS) fabricated by stereo lithography IEEE Proc. Microelectromech. Syst. 1994 1 6
    • (1994) IEEE Proc. Microelectromech. Syst. , pp. 1-6
    • Ikuta, K.1    Hirowatari, K.2    Ogata, T.3
  • 12
    • 0026433724 scopus 로고
    • Microfabrication techniques for integrated sensors and microsystems
    • K.D. Wise, and K. Najafi Microfabrication techniques for integrated sensors and microsystems Science 254 1991 1335 1342
    • (1991) Science , vol.254 , pp. 1335-1342
    • Wise, K.D.1    Najafi, K.2
  • 14
    • 3142665370 scopus 로고    scopus 로고
    • New integrated axle fabrication for piezoelectric motors based on a rotor chip assembling operation
    • Sendai, Japan, June 7-10
    • L. Dellmann, S. Gautsch, G.-A. Racine, and N. de Rooij New integrated axle fabrication for piezoelectric motors based on a rotor chip assembling operation Proceedings Transducers'99 Sendai, Japan, June 7-10 1999 1752 1755
    • (1999) Proceedings Transducers'99 , pp. 1752-1755
    • Dellmann, L.1    Gautsch, S.2    Racine, G.-A.3    De Rooij, N.4
  • 15
    • 0037480717 scopus 로고    scopus 로고
    • Integrated screen microfilter system using inclined SU-8 structures
    • Kyoto, Japan
    • Y.K. Yoon, J.-H. Park, F. Cros, and M. Allen Integrated screen microfilter system using inclined SU-8 structures Proceedings MEMS'03 Kyoto, Japan 2003 227 230 19-23
    • (2003) Proceedings MEMS'03 , pp. 227-230
    • Yoon, Y.K.1    Park, J.-H.2    Cros, F.3    Allen, M.4
  • 16
    • 0038155509 scopus 로고    scopus 로고
    • Fabrication of 3D microstructures with inclined/rotated UV lithography
    • Koyo, Japan, January 19-23
    • M. Han, W. Lee, S. Lee, and S.S. Lee Fabrication of 3D microstructures with inclined/rotated UV lithography Proceedings MEMS'03 Koyo, Japan, January 19-23 2003 554 557
    • (2003) Proceedings MEMS'03 , pp. 554-557
    • Han, M.1    Lee, W.2    Lee, S.3    Lee, S.S.4
  • 18
    • 0038670237 scopus 로고    scopus 로고
    • Microfluidic memory and control devices
    • A. Groisman, M. Enzelberger, and S. Quake Microfluidic memory and control devices Science 300 2003 955 958
    • (2003) Science , vol.300 , pp. 955-958
    • Groisman, A.1    Enzelberger, M.2    Quake, S.3
  • 19
    • 0035125116 scopus 로고    scopus 로고
    • Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS
    • J. Zhang, K.L. Tan, G.D. Hong, L.J. Yang, and H.Q. Gong Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS J. Micromech. Microeng. 11 2001 20 26
    • (2001) J. Micromech. Microeng. , vol.11 , pp. 20-26
    • Zhang, J.1    Tan, K.L.2    Hong, G.D.3    Yang, L.J.4    Gong, H.Q.5
  • 20
    • 0030649160 scopus 로고    scopus 로고
    • Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic
    • Chicago, IL, June 16-19
    • L.J. Guerin, M. Bossel, M. Demierre, S. Calmes, and P. Renaud Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic Proceedings Transducers'97 Chicago, IL, June 16-19 1997 1419 1422
    • (1997) Proceedings Transducers'97 , pp. 1419-1422
    • Guerin, L.J.1    Bossel, M.2    Demierre, M.3    Calmes, S.4    Renaud, P.5
  • 21
    • 0032064598 scopus 로고    scopus 로고
    • Burried microchannles in photopolymer for delivering of solutions to neurons in a network
    • M.O. Heuschkel, L. Guerin, B. Buisson, D. Bertrand, and P. Renaud Burried microchannles in photopolymer for delivering of solutions to neurons in a network Sens. Actuators Chem. B 48 1998 356 361
    • (1998) Sens. Actuators Chem. B , vol.48 , pp. 356-361
    • Heuschkel, M.O.1    Guerin, L.2    Buisson, B.3    Bertrand, D.4    Renaud, P.5
  • 22
    • 0035124001 scopus 로고    scopus 로고
    • A novel micromachining method for the fabrication of thick-film SU-8 embedded microchannels
    • F.E.H. Tay, J.A.V. Kan, F. Watt, and W.O. Choong A novel micromachining method for the fabrication of thick-film SU-8 embedded microchannels J. Micromech. Microeng. 11 2001 27 32
    • (2001) J. Micromech. Microeng. , vol.11 , pp. 27-32
    • Tay, F.E.H.1    Kan, J.A.V.2    Watt, F.3    Choong, W.O.4
  • 23
    • 0037438784 scopus 로고    scopus 로고
    • A novel fabrication method of embedded microchannels by using SU-8 thick-film photoresists
    • Y.-J. Chuang, F.-G. Tseng, J.-H. Cheng, and W.-K. Lin A novel fabrication method of embedded microchannels by using SU-8 thick-film photoresists Sens. Actuators Phys. A 103 2003 64 69
    • (2003) Sens. Actuators Phys. A , vol.103 , pp. 64-69
    • Chuang, Y.-J.1    Tseng, F.-G.2    Cheng, J.-H.3    Lin, W.-K.4
  • 24
    • 29144500314 scopus 로고    scopus 로고
    • http://www.microchem.com/products
  • 25
    • 29144449133 scopus 로고    scopus 로고
    • http://www.spectraphysics.com/
  • 26
    • 0038017563 scopus 로고    scopus 로고
    • A disposable capillary micropump using frozen water as sacrificial layer
    • Hilton Head Island, SC, June 3-6
    • L.-W. Pan, Y.-C. Su, S. Li, and L. Lin A disposable capillary micropump using frozen water as sacrificial layer Proceedings Hilton Head'02 Hilton Head Island, SC, June 3-6 2002 293 296
    • (2002) Proceedings Hilton Head'02 , pp. 293-296
    • Pan, L.-W.1    Su, Y.-C.2    Li, S.3    Lin, L.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.