Three-dimensional integrated optics using polymers

IEEE Journal of Quantum Electronics

Volumn 35, Issue 8, 1999, Pages 1146-1155

  Garner, Sean M ^a   Lee, Sang Shin ^a   Chuyanov, Vadim ^a   Chen, Antao ^a   Yacoubian, Araz ^a   Steier, William H ^a   Dalton, Larry R ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENCE; ELECTRIC LOSSES; ELECTROOPTICAL DEVICES; INTEGRATED CIRCUIT LAYOUT; MASKS; OPTICAL INTERCONNECTS; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; SEMICONDUCTING POLYMERS; THREE DIMENSIONAL; WAVEGUIDE COMPONENTS;

MULTIPLE CORE LEVELS; THREE DIMENSIONAL OPTICAL INTEGRATED CIRCUITS; VERTICAL POWER SPLITTERS; VERTICAL WAVEGUIDE BENDS;

INTEGRATED OPTOELECTRONICS;

EID: 0033171353     PISSN: 00189197     EISSN: None     Source Type: Journal    
DOI: 10.1109/3.777214     Document Type: Article

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