Laser-assisted chemical vapor deposition of carbon for the growth of high aspect ratio micro rods and direct writing of surface patterns

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4830, Issue , 2002, Pages 177-181

  Jeong, Sungho ^a   Kim, Jinbum ^a   Kim, Sunghoon ^a   Lee, Dongjun ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Direct writing; Laser assisted chemical vapor deposition; Micro rod

Indexed keywords

ASPECT RATIO; CHEMICAL VAPOR DEPOSITION; ETHYLENE; GAS LASERS; LASER APPLICATIONS; LASER BEAM EFFECTS; PYROLYSIS; SUBSTRATES; SURFACE PHENOMENA; THIN FILMS;

ARGON ION LASERS; PYROLYTIC DECOMPOSITION;

GRAPHITE;

EID: 0038662922     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.486576     Document Type: Conference Paper

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