Electrical properties of screen printed PZT thick films infiltrated with photo-sensitive sol compared with normal sol for cantilever type biochip

Integrated Ferroelectrics

Volumn 69, Issue , 2005, Pages 163-171

  Park, Jae Hong ^a,c   Son, Jin Ho ^a   Yoon, Dae Sung ^a   Kim, Tae Song ^a   Park, Hyoung Ho ^b   Kim, Hwan ^c  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

^c Seoul National University   (South Korea)

Author keywords

Biochip; Cantilever; MEMS; Photosensitive; Piezoelectric; PZT thick film; Self pattern able; Sol

Indexed keywords

ACTUATORS; ELECTRIC PROPERTIES; MICROELECTROMECHANICAL DEVICES; PHOTOSENSITIVITY; PIEZOELECTRIC DEVICES; SOLS;

BIOCHIP; CANTILEVER; PHOTOSENSITIVE; PZT THICK FILM; SELF PATTERN-ABLE;

THICK FILMS;

EID: 29144473730     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580590898613     Document Type: Conference Paper

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