Evaluation of self-patterned PbZrxTi1-xO3 thin film from photosensitive solution

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 9 B, 1999, Pages 5350-5353

  Uozumi, Gakuji ^a   Kageyama, Kensuke ^a   Atsuki, Tsutomu ^a   Soyama, Nobuyuki ^b   Ogi, Katsumi ^b  

^a Central Research Institute   (Japan)

^b MITSUBISHI MATERIALS CORPORATION   (Japan)

Author keywords

Ferroelectric; Photosensitive; PZT; Sol gel; Ultraviolet rays

Indexed keywords

BINARY MIXTURES; ETHANOL; FERROELECTRIC MATERIALS; LEAD COMPOUNDS; MORPHOLOGY; PHOTOSENSITIVITY; SOL-GELS; SURFACE ROUGHNESS; THIN FILMS; ULTRAVIOLET RADIATION;

ISOPROPYL ALCOHOL; LEAD ZIRCONATE TITANATE; METHOXYETHANOL;

DIELECTRIC FILMS;

EID: 0033334967     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.5350     Document Type: Article

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