Processing of PZT piezoelectric thick films on silicon for microelectromechancial systems

Journal of Micromechanics and Microengineering

Volumn 9, Issue 3, 1999, Pages 218-229

  Beeby, S P ^a   Blackburn, A ^a   White, N M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000005030     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/3/302     Document Type: Article

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