The extended range of reaction-layer fatigue susceptibility of polycrystalline silicon thin films

International Journal of Fracture

Volumn 135, Issue 1-4, 2005, Pages 1-18

  Pierron, O N ^a   Muhlstein, C L ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

MEMS; Reaction layer fatigue; Silicon

Indexed keywords

CRACK INITIATION; ELASTICITY; FATIGUE OF MATERIALS; FRACTURE MECHANICS; FRACTURE TOUGHNESS; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON; THIN FILMS;

FATIGUE MECHANISM; LINEAR ELASTIC FRACTURE MECHANICS; REACTION-LAYER FATIGUE SUSCEPTIBILITY; SILICON THIN FILMS;

POLYSILICON;

EID: 29144445980     PISSN: 03769429     EISSN: 15732673     Source Type: Journal    
DOI: 10.1007/s10704-005-3469-y     Document Type: Article

References (41)

1. S. Allameh P. Shrotriya A. Butterwick S. Brown and W.O. Soboyejo 2003 Surface topography evolution and fatigue fracture in polysilicon MEMS structures Journal of Microelectromechanical Systems 12 313-324 10.1109/ JMEMS.2003.809957
2. Alsem, D.H., Stach, E.A., Muhlstein, C.L. and Ritchie, R.O. (2005). Fatigue failure in thin-film polycrystalline silicon is due to subcritical cracking within the oxide layer. Applied Physics Letters, in press.
3. Bagdahn J., and Sharpe W.N.J. (2002). Eighth International Fatigue Congress, Fatigue 2002.
4. J. Bagdahn and W.N.J. Sharpe 2003 Fatigue of polycrystalline silicon under long-term cyclic loading Sensors and Actuators A 103 9-15 10.1016/ S0924-4247(02)00328-X
5. M. Bailes S. Bohm L.M. Peter D.J. Riley and R. Greef 1998 An electrochemical and ellipsometric study of oxide growth on silicon during anodic etching in fluoride solutions Electrochimica Acta 43 1757-1772 10.1016/S0013-4686(97)00307-1
6. M. Bertoldi and V.M. Sglavo 2002 Influence of composition on fatigue behavior and threshold stress intensity factor of borosilicate glasses Journal of the American Ceramic Society 85 2499-2506 10.1111/ j.1151-2916.2002.tb00487.x
7. J.L.J. Beuth 1992 Cracking of thin bonded films in residual tension International Journal of Solid Structures 29 1657-1675
8. J.R. Brockenbrough and S. Suresh 1987 Constitutive behavior of a microcracking brittle solid in cyclic compression Journal of the Mechanics and Physics of Solids 35 721-742 10.1016/0022-5096(87)90052-4
9. D Broek 1986 Elementary Engineering Fracture Mechanics 4th edn. Martinus Nijhoff Hingham, MA
10. A. Bsiesy F. Gaspard R. Herino M. Ligeon and F. Muller 1991 Anodic oxidation of porous silicon layers formed on lightly p-doped substrates Journal of the Electrochemical Society 138 3450-3456
11. C.P. Chen and M.H. Leipold 1980 Fracture toughness of silicon American Ceramic Society Bulletin 59 469-472
12. C.-R. Chiang W.-H. Chen and K.-T. Chen 1987 An integral Jro for a crack perpendicular to the interface of a bonded composite Engineering Fracture Mechanics 28 301-307 10.1016/0013-7944(87)90224-4 1987ise..conf.....C
13. J.A. Connally and S.B. Brown 1992 Slow crack growth in single-crystal silicon Science 256 1537-1539 1992Sci...256.1537C
14. T.S. Cook and F. Erdogan 1972 Stresses in bonded materials with a crack perpendicular to the interface International Journal of Engineering Science 10 677-697 10.1016/0020-7225(72)90063-8
15. M.R. Dundurs 1969 Edge-bonded dissimilar orthogonal elastic wedges Journal of Applied Mechanics 36 650-652
16. M. He and J.W. Hutchinson 1989 Crack deflection at an interface between dissimliar elastic materials International Journal of Solids and Structures 25 1053-1067
17. H. Kahn R. Ballarini J.J. Bellante and A.H. Heuer 2002 Fatigue failure in polysilicon not due to simple stress corrosion cracking Science 298 1215 2002Sci...298.1215K
18. H. Kahn R. Ballarini R.L. Mullen and A.H. Heuer 1999 Electrostatically actuated failure of micro-fabricated polysilicon fracture mechanics specimens Proceedings of the Royal Society of London 455 3807-3823 1999RSPSA.455.3807K
19. H. Kahn N. Tayebi R. Ballarini R.L. Mullen and A.H. Heuer 2000 Fracture toughness of polysilicon MEMS devices Sensors and Actuators A 82 274-280 10.1016/S0924-4247(99)00366-0
20. H. Kapels R. Aigner and J. Binder 2000 Fracture strength and fatigue of polysilicon determined by a novel thermal actuator IEEE Transactions on Electronic Devices 47 1522
21. B.R. Lawn D.B. Marshall and P. Chantikul 1981 Mechanics of strength-degrading contact flaws in silicon Journal of Materials Science 16 1769-1775
22. O. Millet B. Legrand D. Collard and L. Buchaillot 2002 Influence of the step covering on fatigue phenomenon for polycrystalline silicon micro-electro-mechanical-systems (MEMS) Japanese Journal of Applied Physics 41 L1339-L1341 10.1143/JJAP.41.L1339
23. C.L. Muhlstein S.B. Brown and R.O. Ritchie 2001 High-cycle fatigue of single-crystal silicon thin films Journal of Microelectromechanical Systems 10 59310.1109/84.967383
24. C.L. Muhlstein and R.O. Ritchie 2003 High-cycle fatigue of micron-scale polycrystalline silicon films: Fracture mechanics analyses of the role of the silica/silicon interface International Journal of Fracture 120 449-474 10.1023/A:1024988031390
25. C.L. Muhlstein E.A. Stach and R.O. Ritchie 2002 A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading Acta Materialia 50 3579-3595 10.1016/S1359-6454(02)00158-1
26. M. Muraoka and H. Abe 1996 Subcritical crack growth in silica optical fibers in a wide range of crack velocities Journal of the American Ceramic Society 79 51-57 10.1111/j.1151-2916.1996.tb07879.x
27. O.N. Pierron D.D. Macdonald and C.L. Muhlstein 2005 Galvanic effects in Si-based microelectromechanical systems: Thick oxide formation and its implications for fatigue reliability Applied Physics Letters 86 211919-211913 10.1063/1.1939072 2005ApPhL..86U1919P
28. Pierron, O.N. and Muhlstein, C.L. (2005). The Critical Role of Environment in Fatigue Damage Accumulation in Single-Crystal Silicon Structural Films. Journal of Microelectromechanical Systems, in press.
29. W. Sharpe K.T. Turner Jr. and R.L. Edwards 1999 Tensile testing of polysilicon Experimental Mechanics 39 162-170
30. W.N.J. Sharpe and J. Bagdahn 2004 Fatigue testing of polysilicon - a review Mechanics of Materials 36 3-11 10.1016/S0167-6636(03)00027-9
31. P. Shrotriya S. Allameh S. Brown Z. Suo and W.O. Soboyejo 2002a Fatigue damage evolution in silicon films for micromechanical applications. (Edited by A. Blom) In: Fatigue 2002, International Congress on Fatigue Engineering Materials Advisory Services LTD Stockholm, Sweden pp. 3395-3400
32. P. Shrotriya S. Allameh A. Butterwick S. Brown and W.O. Soboyejo 2002b Mechanisms of fatigue in polysilicon MEMS structures Materials Research Society Symposium Boston, MA 29-34
33. P. Shrotriya S. Allameh and W.O. Soboyejo 2004 On the evolution of surface morphology of polysilicon MEMS structures during fatigue Mechanics of Materials 36 35-44 10.1016/S0167-6636(03)00029-2
34. G. Simmons and H. Wang 1971 Single Crystal Elastic Constants and Calculated Aggregate Properties: A Handbook 2nd edn. MIT Press Cambridge, MA
35. K. Sumino 1999 Deformation behavior of silicon Metallurgical and Materials Transactions A 30A 1465
36. H. Tada P.C. Paris and G.R. Irwin 2000 The Stress Analysis of Cracks Handbook 3rd edn. Academic Press New York
37. 2 films Sensors and Actuators A 82 286-290
38. B. Wong and R.J. Holbrook 1987 Microindentation for fracture and stress-corrosion cracking studies in single-crystal silicon Journal of the Electrochemical Society 134 2254
39. A.R. Zak and M.L. Williams 1963 Crack point stress singularities at a bi-material interface Journal of Applied Mechanics 30 142
40. X.G. Zhang 2001 Electrochemistry of Silicon and its Oxide Kluwer Academic/Plenum New York
41. X.G. Zhang S.D. Collins and R.L. Smith 1989 Porous silicon formation and electropolishing of silicon by anodic polarization in HF solution Journal of the Electrochemical Society 136 1561