Creating three-dimensional polymeric microstructures by multibeam interference lithography

Journal of Macromolecular Science - Polymer Reviews

Volumn 45, Issue 4, 2005, Pages 351-373

  Moon, Jun Hyuk ^a   Yang, Shu ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

2D and 3D microstructures; Holographic polymerdispersed liquid crystals; Lithography; Maskless; Multibeam interference; Negativetone; Organicinorganic hybrids; Photoresist; Positivetone

Indexed keywords

ETCHING; ION BEAM LITHOGRAPHY; MICROSTRUCTURE; PHOTORESISTS; THICK FILMS;

2D AND 3D MICROSTRUCTURES; HOLOGRAPHIC POLYMERDISPERSED LIQUID CRYSTALS; MASKLESS; MULTIBEAM INTERFERENCE; NEGATIVETONE; ORGANICINORGANIC HYBRIDS; PHOTORESIST; POSITIVETONE;

POLYMERS;

EID: 28844438436     PISSN: 15321797     EISSN: 15329038     Source Type: Journal    
DOI: 10.1080/15321790500304163     Document Type: Article

References (100)

1. Polman, A. and Wiltzius, P. (2001) Material science aspects of photonic crystals. MRS Bulletin, 26 (8): 608-610.
2. Li, Y.Y. et al. (2003) Polymer replicas of photonic porous silicon for sensing and drug delivery applications. Science, 299 (5615): 2045-2047.
3. Morey, M.S., Davidson, A., and Stucky, G.D. (1998) Silica-based, cubic mesostructures: Synthesis, characterization and relevance for catalysis. J. Porous Mater., 5 (3-4): 195-204.
4. Cumpston, B.H. et al. (1999) Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication. Nature, 398 (6722): 51-54.
5. Therriault, D., White, S.R., and Lewis, J.A. (2003) Chaotic mixing in three-dimensional microvascular networks fabricated by direct-write assembly. Nature Mater., 2 (4): 265-271.
6. Abbott, A. (2003) Cell culture: Biology's new dimension. Nature, 424 (6951): 870-872.
7. Semino, C.E., Merok, J.R., Crane, G.G., Panagiotakos, G., and Zhang, S.G. (2003) Functional differentiation of hepatocyte-like spheroid structures from putative liver progenitor cells in three-dimensional peptide scaffolds. Differentiation, 71 (4-5): 262-270.
8. Anders, M., Hansen, R., Ding, R.X., Rauen, K.A., Bissell, M.J., and Korn, W.M. (2003) Disruption of 3D tissue integrity facilitates adenovirus infection by deregulating the coxsackievirus and adenovirus receptor. Proc. Nat. Acad. Sci. USA, 100 (4): 1943-1948.
9. Qi, J. and Crawford, G.P. (2004) Holographically formed polymer dispersed liquid crystal displays. Displays, 25 (5): 177-186.
10. Aoki, K. et al. (2003) Microassembly of semiconductor three-dimensional photonic crystals. Nature Mater., 2 (2): 117-121.
11. Johnson, S.G. and Joannopoulos, J.D. (2000) Three-dimensionally periodic dielectric layered structure with omnidirectional photonic band gap. Appl. Phys. Lett., 77 (22): 3490-3492.
12. Lin, S.Y. et al. (1998) A three-dimensional photonic crystal operating at infrared wavelengths. Nature, 394 (6690): 251-253.
13. Nonogaki, S., Ueno, T., and Ito, T. (1998) Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology. Marcel Dekker: New York.
14. Vlasov, Y.A., Bo, X.-Z., Sturm, J.C., and Norris, D.J. (2001) On-chip natural assembly of silicon photonic bandgap crystals. Nature, 414 (6861): 289-293.
15. Colvin, V.L. (2001) From opals to optics: Colloidal photonic crystals. MRS Bulletin, 26 (8): 637-641.
16. Edrington, A.C. et al. (2001) Polymer-based photonic crystals. Adv. Mater., 13 (6): 421-425.
17. Ozin, G.A. and Yang, S.M. (2001) The race for the photonic chip: Colloidal crystal assembly in silicon wafers. Adv. Func. Mater., 11 (2): 95-104.
18. Xia, Y.N., Yin, Y.D., Lu, Y., and McLellan, J. (2003) Template-assisted self-assembly of spherical colloids into complex and controllable structures. Adv. Fund. Mater., 13 (12): 907-918.
19. Kim, S.O. et al. (2003) Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates. Nature, 424 (6947): 411-414.
20. Lumsdon, S.O., Kaler, E.W., and Velev, O.D. (2004) Two-dimensional crystallization of microspheres by a coplanar AC electric field. Langmuir, 20 (6): 2108-2116.
21. Winkleman, A., Gates, B.D., McCarty, L.S., and Whitesides, G.M. (2005) Directed self-assembly of spherical particles on patterned electrodes by an applied electric field. Adv Mater., 17 (12): 1507.
22. Zein, L, Hutmacher, D.W., Tan, K.C., and Teoh, S.H. (2002) Fused deposition modeling of novel sca.old architectures for tissue engineering applications. Biomaterials, 23 (4): 1169-1185.
23. Landers, R., Hubner, U., Schmelzeisen, R., and Mulhaupt, R. (2002) Rapid prototyping of scaffolds derived from thermoreversible hydrogels and tailored for applications in tissue engineering. Biomaterials, 23 (23): 4437-4447.
24. Vozzi, G., Flaim, C., Ahluwaliaa, A., and Bhatia, S. (2003) Fabrication of PLGA scaffolds using soft lithography. Journal of Macromolecular Science, Part C: Polymer Reviews and microsyringe deposition. Biomaterials, 24 (14): 2533-2540.
25. Chelnokov, A., Wang, K., Rowson, S., Garoche, P., and Lourtioz, J.M. (2000) Near-infrared Yablonovite-like photonic crystals by focused-ion-beam etching of macroporous silicon. Appl. Phys. Lett., 77 (19): 2943-2945.
26. Gratson, G.M., Xu, M., and Lewis, J.A. (2004) Direct writing of threedimensional webs. Nature, 428 (6981): 386.
27. Rao, R.B., Krafcik, K.L., Morales, A.M., and Lewis, J.A. (2005) Microfabricated deposition nozzles for direct write assembly of three-dimensional periodic structures. Adv. Mater., 17 (3): 289-293.
28. Tang, M.D., Golden, A.P., and Tien, J. (2003) Molding of three-dimensional microstructures of gels. J. Am. Chem. Soc., 125 (43): 12988-12989.
29. Kennedy, S.R., Brett, M.J., Toader, O., and John, S. (2002) Fabrication of tetragonal square spiral photonic crystals. Nano Letters, 2 (1): 59-62.
30. Noda, S., Tomoda, K., Yamamoto, N., and Chutinan, A. (2000) Full three-dimensional photonic bandgap crystals at near-infrared wavelengths. Science, 289 (5479): 604-606.
31. Kawata, S., Sun, H.-B., Tanaka, T., and Takada, K., Finer features for functional microdevices. Nature, 412 (6848): 697-698.
32. Stellacci, F., Bauer, C.A., Meyer-Friedrichsen, T., Wenseleers, W., Marder, S.R., and Perry, J.W. (2003) Ultrabright supramolecular beacons based on the self-assembly of two-photon chromophores on metal nanoparticles. J. Am. Chem. Soc., 125 (2): 328-329.
33. Wu, P.W., Cheng, W., Martini, LB., Dunn, B., Schwartz, B.J., and Yablonovitch, E. (2002) Two-photon photographic production of three-dimensional metallic structures within a dielectric matrix. Adv. Mater., 12 (19): 1438-1441.
34. Zhou, W.H. et al. (2002) An efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication. Science, 296 (5570): 1106-1109.
35. Deubel, M. et al. (2004) Direct laser writing of three-dimensional photonic-crystal templates for telecommunications. Nature Mater., 3 (7): 444-447.
36. Campbell, M., Sharp, D.N., Harrison, M.T., Denning, R.G., and Turberfield, A.J. (2000) Fabrication of photonic crystals for the visible spectrum by holographic lithography. Nature, 404 (6773): 53-56.
37. Divliansky, I., Mayer, T.S., Holliday, K.S., and Crespi, V.H. (2003) Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography. Appl. Phys. Lett., 79 (21): 3392-3394.
38. Divliansky, I.B. et al. (2001) Fabrication of two-dimensional photonic crystals using interference lithography and electrodeposition of CdSe. Appl. Phys. Lett., 79 (21): 3392-3394.
39. Yang, S., Megens, M., Aizenberg, J., Wiltzius, P., Chaikin, P.M., and Russel, W.B. (2002) Creating periodic three-dimensional structures by multibeam interference of visible laser. Chem. Mater., 14 (7): 2831-2833.
40. Wang, X. et al. (2003) Three dimensional photonic crystals fabricated by visible light holographic lithography. Appl. Phys. Lett., 82 (14): 2212-2214.
41. Sharp, D.N., Turberfield, A.J., and Denning, R.G. (2004) Holographic photonic crystals with diamond symmetry. Phys. Rev., 68 (20): 205102.
42. Escuti, M.J. and Crawford, G.P. (2004) Holographic photonic crystals. Opt. Eng., 43 (9): 1973-1987.
43. Ullal, C.K., Maldovan, M., Thomas, E.L., Chen, G., Han, Y-J., and Yang, S. (2004) Photonic crystals through holographic lithography: simple cubic, diamond-like and gyroid-like structures. Appl. Phys. Lett., 84 (26): 5434-5436.
44. Yang, S. and et al. (2005) Functional biomimetic microlens arrays with integrated pores. Adv. Mater., 17 (4): 435-438.
45. Fernandez, A., Bedrossian, P.J., Baker, S.L., Vernon, S.P., and Kania, D.R. (1996) Magnetic force microscopy of single-domain cobalt dots patterned using interference lithography. IEEE Trans. Magnet., 32 (5): 4472-4474.
46. Vogelaar, L. et al. (2001) Large area photonic crystal slabs for visible light with waveguiding defect structures: Fabrication with focused ion beam assisted laser interference lithography. Adv. Mater., 13 (20): 1551-1554.
47. Kang, J.W. et al. (2004) Polymeric wavelength filters fabricated using holographic surface relief gratings on azobenzene-containing polymer films. Appl. Phys. Lett., 82 (22): 3823-3825.
48. Thompson, L.F., Willson, C.G., and Bowden, M.J. (1994) Introduction to Microlithography. American Chemical Society: Washington, DC.
49. Petsas, K.I., Coates, A.B., and Grynberg, G. (1994) Crystallography of optical lattices. Phys. Rev. A, 50 (6): 5173-5189.
50. Yuan, L., Wang, G.P., and Huang, X.K. (2003) Arrangements of four beams for any Bravais lattice. Opt. Lett., 28 (19): 1769-1771.
51. Cai, L.Z., Yang, X.L., Liu, Q., and Wang, Y.R. (2003) What kind of Bravais lattices can be made by the interference of four umbrellalike beams?. Opt. Comm., 224 (4-6): 243-246.
52. Cai, L.Z., Yang, X.L., and Wang, Y.R. (2002) Formation of three-dimensional periodic microstructures by interference of four noncoplanar beams. J. Opt. Soc. Am. A, 19 (11): 2238-2244.
53. Cai, L.Z., Yang, X.L., and Wang, Y.R- (2002) All fourteen Bravais lattices can be formed by interference of four noncoplanar beams. Opt. Lett., 27 (11): 900-902.
54. Su, H.M. et al. (2003) Effects of polarization on lasaer holography for microstructure fabrication. Phys. Rev. E., 675): 056619.
55. Ullal, C.K., Maldovan, M., Wohlgemuth, M., and Thomas, E.L. (2003) Triply periodic bicontinuous structures through interference lithography: a level-set approach. J. Opt. Soc. Am. A., 20 (5): 948-954.
56. Grynberg, G., Lounis, B., Verkerk, P., Courtois, J.Y., and Salomon, C. (1993) Quantized Motion of Cold Cesium Atoms in 2-Dimensional and 3- Dimensional Optical Potentials. Phys. Rev. Lett., 70 (15): 2249-2252.
57. Dufresne, E.R., Spalding, G.C., Dearing, M.T., Sheets, S.A., and Grier, D.G. (2001) Computer-generated holographic optical tweezer arrays. Rev. Sci. Instr., 72 (3): 1810-1816.
58. Curtis, J.E., Koss, B.A., and Grier, D.G. (2002) Dynamic holographic optical tweezers. Opt. Comm., 207 (1-6): 169-175.
59. Ladavac, K. and Grier, D.G. (2004) Microoptomechanical pumps assembled and driven by holographic optical vortex arrays. Opt. Exp., 12 (6): 1144-1149.
60. Moon, J.H., Yang, S.M., Pine, D.J., and Chang, W.S. (2004) Multiple-exposure holographic lithography with phase shift. Appl. Phys Lett., 85 (18): 4184-4186.
61. Berger, V., GauthierLafaye, O., and Costard, E. (1997) Fabrication of a 2D photonic bandgap by a holographic method. Electron. Lett., 33 (5): 425-426.
62. Shishido, A. et al. (2001) Direct fabrication of two-dimensional titania arrays using interference photolithography. Appl. Phys. Lett., 79 (20): 3332-3334.
63. Zaidi, S.H. and Brueck, S.R.J. (1993) Multiple-exposure interferometric lithography. J. Vac. Sci. Technol. B, 11 (3): 658-666.
64. Gigli, G., Rinaldi, R., Turco, C., Visconti, P., Cingolani, R., and Cacialli, F. (1998) Holographic nanopatterning of the organic semiconductor poly(p-phenylene vinylene). Appl. Phys. Lett., 73 (26): 3926-3928.
65. Solak, H.H., David, C., Gobrecht, J., Wang, L., and Cerrina, F. (2002) Multiple-beam interference lithography with electron beam written gratings. J. Vac. Sci Technol. B., 20 (6): 2844-2848.
66. Pang, L., Nakagawa, W., and Fainman, Y. (2003) Fabrication of two-dimensional photonic crystals with controlled defects by use of multiple exposures and direct write. Appl. Opt., 42 (27): 5450-5456.
67. Visconti, P., Turco, C., Rinaldi, R., and Cingolani, R. (2000) Nanopatterning of organic and inorganic materials by holographic lithography and plasma etching. Microelec. Eng., 53 (1-4): 391-394.
68. Yablonovitch, E. and Gmitter, T.J. (1989) Photonic band-structure - the face-centered-cubic case. Phys. Rev. Lett., 63 (18): 1950-1953.
69. Joannopoulos, J.D., Meade, R.D., and Winn, J.N. (1995) Photonic Crystals. NJ., Princeton University Press: Princeton.
70. Shoji, S. and Kawata, S. (2000) Photofabrication of three-dimensional photonic crystals by multibeam laser interference into a photopolymerizable resin. Appl. Phys. Lett., 76 (19): 2668-2670.
71. Lin, Y., Herman, P.R., and Darmawikarta, K. (2005) Design and holographic fabrication of tetragonal and cubic photonic crystals with phase mask: toward the mass-production of three-dimensional photonic crystals. Appl. Phys. Lett., 86 (7): 071117.
72. Miklyaev, Y.V. et al. (2003) Three-dimensional face-centered-cubic photonic crystal templates by laser holography: fabrication, optical characterization, and band-structure calculations. Appl. Phys. Lett., 82 (8): 1284-1286.
73. Toader, O., Chan, T.Y.M., and John, S. (2004) Photonic band gap architectures for holographic lithography. Phys. Rev. Lett., 92 (4): 043905.
74. Maldovan, M. and Thomas, E.L. (2004) Diamond-structured photonic crystals. Nature Mater., 3 (9): 593-600.
75. Wohlgemuth, M., Yufa, N., Hoffman, J., and Thomas, L.E. (2001) Triply periodic bicontinuous cubic microdomain morphologies by symmetries. Macromolecules., 34 (17): 6083-6089.
76. Moon, J.H. et al. (2005) Patterned polymer photonic crystals using soft lithography and holographic lithography. Syn. Metals, 148 (1): 99-102.
77. Lee, K.Y. et al. (1995) Micromachining applications of a high resolution ultrathick photoresist. J. Vac. Sci. Technol. B, 13 (6): 3012-3016.
78. Shaw, J.M., Gelorme, J.D., LaBianca, N.C., Conley, W.E., and Holmes, S.J. (1997) Negative photoresists for optical lithography. IBM J. Res. Dev., 41 (1-2): 81.
79. Rajaraman, S.K., Mowers, W.A., and Crivello, J.V. (1999) Interaction of epoxy and vinyl ethers during photoinitiated cationic polymerization. J. Polym. Sci. A - Polym. Chem., 37 (21): 4007-4018.
80. Boey, F., Rath, S.K., Ng, A.K., and Abadie, M.J.M. (2002) Cationic UV cure kinetics for multifunctional epoxies. J. Appl. Polym. Sci., 86 (2): 518-525.
81. Bi, Y.B. and Neckers, D.C. (1994) A Visible-light initiating system for free-radical promoted cationic polymerization. Macromolecules., 27 (14): 3683-3693.
82. Hua, Y.J. and Crivello, J.V. (2001) Development of polymeric photosensitizers for photoinitiated cationic polymerization. Macromolecules., 34 (8): 2488-2494.
83. Crivello, J.V. and Lam, J.H.W. (1978) Dye-sensitized photoinitiated cationic polymerization. J. Polym. Sci: Polym. Chem. Ed, 16 (10): 2441-2451.
84. Crivello, J.V. and Sangermano, M. (2001) Visible and long-wavelength photoinitiated cationic polymerization. J. Polym. Sci. A-Polym. Chem., 39 (3): 343-356.
85. Hinsberg, W. et al. (2000) Effect of resist components on image spreading during postexposure bake of chemically amplified resists. In Advances in Resist Technology and Processing XVII. Houlihan, F.M. (ed.), The International Society for Optical Engineering: California, p. 448.
86. Shoji, S., Sun, H.B., and Kawata, S. (2003) Photofabrication of wood-pile three-dimensional photonic crystals using four-beam laser interference. Appl. Phys. Lett., 83 (4): 608-610.
87. Saravanamuttu, K. (2003) Sol-gel organic-inorganic composites for 3-D holographic lithography of photonic crystals with submicron periodicity. Chem. Mater., 15 (12): 2301-2304.
88. Yoshino, K., Shimoda, Y., Kawagishi, Y., Nakayama, K., and Ozaki, M. (1999) Temperature tuning of the stop band in transmission spectra of liquid-crystal infiltrated synthetic opal as tunable photonic crystal. Appl. Phys. Lett., 75 (7): 932-934.
89. Kang, D., Maclennan, J.E., Clark, N.A., Zakhidov, A.A., and Baughman, R.H. (2001) Electro-optic behavior of liquid-crystal-filled silica opal photonic crystals: Effect of liquid-crystal alignment. Phys. Rev. Lett., 86 (18): 4052-4055.
90. Mach, P. and et al. (2002) Electro-optic response and switchable Bragg diffraction for liquid crystals in colloid-templated materials. Phys. Rev. E., 65 (3): 031720.
91. Bunning, T.J., Natarajan, L.V., Tondiglia, V.P., and Sutherland, R.L. (2000) Holographic polymer-dispersed liquid crystals (H-PDLCs). Ann. Rev. Mater. Sci., 30 (1): 83-115.
92. Boiko, Y., Eakin, J., Vedrine, J., and Crawford, C.P. (2002) Polarization-selective switching in holographically formed polymer dispersed liquid crystals. Optics Letters., 27 (19): 1717-1719.
93. Sutherland, R.L., Tondiglia, V.P., Natarajan, L.V., and Bunning, T.J. (2001) Evolution of anisotropic reflection gratings formed in holographic polymer-dispersed liquid crystals. Appl. Phys. Lett., 79 (10): 1420-1422.
94. Kawatsuki, N., Hasegawa, T., Ono, H., and Tamoto, T. (2003) Formation of polarization gratings and surface relief gratings in photocrosslinkable polymer liquid crystals by polarization holography. Adv. Mater., 15 (12): 991-994.
95. Escuti, M.J., Qi, J., and Crawford, G.P. (2003) Two-dimensional tunable photonic crystal formed in a liquid crystal/polymer composite: Threshold behavior and morphology. Appl. Phys. Lett., 83 (7): 1331.
96. Escuti, M.J., Qi, J., and Crawford, G.P., Tunable face-centered-cubic photonic crystal formed in holographic polymer dispersed liquid crystals. Opt. Lett. 2003, 28 (7): 522-524.
97. Escuti, M.J. and Crawford, G.P. (2004) Mesoscale three dimensional lattices formed in polymer dispersed liquid crystals: A diamond-like face centered cubic. Mol. Cryst. Liq. Cryst., 421: 23-36.
98. Tondiglia, V.P., Natarajan, L.V., Sutherland, R.L., Tomlin, D., and Bunning, T.J. (2002) Holographic formation of electro-optical polymer-liquid crystal photonic crystals. Adv. Mater., 14 (3): 187-191.
99. Robbie, K. and Brett, M.J. (1998) Sculptured thin films and glancing angle deposition: Growth mechanics and applications. J. Vac. Sci. Technol. A, 15 (3): 1460-1465.
100. Robbie, K., Sit, J.C., and Brett, M.J. (1998) Advanced techniques for glancing angle deposition. J. Vac. Sci. Technol. B, 16 (3): 1115-1122.