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Volumn 73, Issue 26, 1998, Pages 3926-3928
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Holographic nanopatterning of the organic semiconductor poly(p-phenylene vinylene)
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Author keywords
[No Author keywords available]
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Indexed keywords
GAS LASERS;
HOLOGRAPHIC INTERFEROMETRY;
MASKS;
NANOTECHNOLOGY;
PHOTOLUMINESCENCE;
PHOTORESISTS;
REACTIVE ION ETCHING;
SEMICONDUCTOR DEVICE MANUFACTURE;
SUBSTRATES;
THIN FILMS;
ARGON ION ETCHING;
HOLOGRAPHIC NANOPATTERNING;
PHOTONIC STRUCTURE;
POLYPHENYLENE VINYLENE;
THERMAL CONVERSION;
SEMICONDUCTING POLYMERS;
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EID: 0032576515
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.122938 Document Type: Article |
Times cited : (28)
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References (15)
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