Relation between mechanical and structural properties of silicon-incorporated hard a-C:H films

Thin Solid Films

Volumn 293, Issue 1-2, 1997, Pages 206-211

  Neto, A L Baia ^a,b   Santos, R A ^a   Freire Jr , F L ^c   Camargo Jr , S S ^a   Carius, R ^d   Finger, F ^d   Beyer, W ^d  

^a FEDERAL UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^b FEDERAL RURAL UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^c PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^d FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Amorphous materials; Carbon; Silicon carbide; Structural properties

Indexed keywords

COMPACTION; DEFECTS; DENSITY (SPECIFIC GRAVITY); ELECTRON ENERGY LEVELS; ELECTRON SPIN RESONANCE SPECTROSCOPY; HYDROGEN BONDS; HYDROGENATION; LIGHT ABSORPTION; MOLECULAR STRUCTURE; RESIDUAL STRESSES; SILICON CARBIDE;

INFRARED ABSORPTION;

AMORPHOUS FILMS;

EID: 0030715943     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0040-6090(96)08948-1     Document Type: Article

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