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Volumn 13, Issue 4-8, 2004, Pages 1342-1345
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A study of ta-C, a-C:H and Si-a:C:H thin films on polymer substrates as a gas barrier
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Author keywords
Coatings; Diffusion; DLC; Surface characterization
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Indexed keywords
CARBON NANOTUBES;
CHEMICAL BONDS;
CHEMICAL VAPOR DEPOSITION;
DIAMONDS;
RAMAN SPECTROSCOPY;
VAPORS;
POLYMER SUBSTRATES;
SURFACE PROFILOMETER;
THIN FILMS;
DIAMOND;
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EID: 2442528535
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2003.10.084 Document Type: Article |
Times cited : (54)
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References (15)
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