|
|
Volumn 111, Issue 2-3, 1999, Pages 134-140
|
|
Thermal stability of diamond-like carbon films with added silicon
a
|
|
Author keywords
DLC; FTIR; Raman; Silicon; Thermal stability; XPS
|
|
Indexed keywords
ADDITION REACTIONS;
ANNEALING;
DIAMOND LIKE CARBON FILMS;
DOPING (ADDITIVES);
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RAMAN SPECTROSCOPY;
SILICON;
THERMODYNAMIC STABILITY;
X RAY PHOTOELECTRON SPECTROSCOPY;
CHEMICAL BONDS;
CRYSTAL STRUCTURE;
OXIDATION;
THERMAL EFFECTS;
RAMAN SPECTROMETRY;
PROTECTIVE COATINGS;
DIAMOND FILMS;
DIAMOND-LIKE CARBON;
FILM;
SILICON;
STABILITY;
INTEGRATED INTENSITY RATIO;
|
|
EID: 0032675783
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(98)00719-1 Document Type: Article |
|
Times cited : (143)
|
|
References (27)
|
