Improvement of mechanical properties of a-C:H by silicon addition

Diamond and Related Materials

Volumn 6, Issue 5-7, 1997, Pages 559-563

  De Martino, C ^a   Fusco, G ^b   Mina, G ^b   Tagliaferro, A ^b   Vanzetti, L ^c   Calliari, L ^c   Anderle, M ^c  

^a Cyberonics Inc   (Italy)

^b POLITECNICO DI TORINO   (Italy)

^c CMBM   (Italy)

Author keywords

a C:H; Argon silane atmosphere; Mechanical properties

Indexed keywords

EID: 0000307577     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00613-9     Document Type: Article

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