Flicker noise in nitrided high-k dielectric NMOS Transistors 03

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5844, Issue , 2005, Pages 31-40

  Min, Bigang ^a   Devireddy, Siva Prasad ^a   Butler, Zeynep Celik ^a   Shanware, Ajit ^b   Green, Keith ^b   Chambers, J J ^b   Visokay, M V ^b   Colombo, Luigi ^b   Rotondaro, A L P ^b  

^a UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

HfSiOn; High k dielectrics; Low frequency noise; MOSFET; SiOn

Indexed keywords

CARRIER MOBILITY; LEAKAGE CURRENTS; MATHEMATICAL MODELS; MOSFET DEVICES; PERMITTIVITY;

HFSION; HIGH-K DIELECTRICS; LOW-FREQUENCY NOISE; SION;

SPURIOUS SIGNAL NOISE;

EID: 28444480203     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.609632     Document Type: Conference Paper

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