Surface growth of (Ti,Al)N thin films on smooth and rough substrates

Thin Solid Films

Volumn 496, Issue 2, 2006, Pages 326-332

  Liu, Z J ^a   Shum, P W ^a   Shen, Y G ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Atomic force microscopy; Nitrides; Sputtering; Surface morphology

Indexed keywords

ATOMIC FORCE MICROSCOPY; MORPHOLOGY; NITRIDES; SOLID SOLUTIONS; SPUTTERING; SUBSTRATES; SURFACE CHEMISTRY; SURFACE ROUGHNESS; SURFACES; THIN FILMS; TITANIUM ALLOYS;

FILM SURFACES; GROWTH EXPONENTS; HIGH-SPEED-STEEL (HSS) SUBSTRATES; ROUGHENING EFFECTS;

GROWTH KINETICS;

EID: 28044459230     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.380     Document Type: Article

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