Modeling of rarefied gas heat conduction between wafer and susceptor

IEEE Transactions on Semiconductor Manufacturing

Volumn 11, Issue 1, 1998, Pages 25-29

  Denpoh, Kazuki ^a  

^a TOKYO ELECTRON LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; GASES; HEAT CONDUCTION; MICROELECTRONIC PROCESSING; MONTE CARLO METHODS; SURFACE ROUGHNESS;

KNUDSEN NUMBER; ONE DIMENSIONAL; SMOLUCHOWSKI EQUATION; SUSCEPTOR; TWO DIMENSIONAL;

SILICON WAFERS;

EID: 0032001751     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.661281     Document Type: Article

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