A MEMS fabrication technique for non-planar substrates

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 268-273

  Li, Wen J ^a   Mai, John D ^a   Ho, Chih Ming ^a  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; INTEGRATED CIRCUITS; MASKS; PHOTORESISTS; SENSORS; SHEAR STRESS; SUBSTRATES;

PLANAR FABRICATION METHODS; QUARTZ CYLINDRICAL SUBSTRATE;

MICROELECTROMECHANICAL DEVICES;

EID: 0031650482     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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