Flow condition in resist spray coating and patterning performance for three-dimensional photolithography over deep structures

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 4 B, 2004, Pages 2387-2391

  Singh, Vijay Kumar ^a   Sasaki, Minoru ^a   Hane, Kazuhiro ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Incident angle; Pinhole density; Resist spray coating; Spray flow; Three dimensional photolithography

Indexed keywords

ANISOTROPY; ASPECT RATIO; DIFFUSION; ELECTRODEPOSITION; ELECTROPLATING; FILTRATION; FLOW PATTERNS; LAMINAR FLOW; NOZZLES; OPTICAL FIBERS; PHOTOLITHOGRAPHY; SYRINGES; TWO PHASE FLOW;

PINHOLE DENSITY; PLANAR PHOTOLITHOGRAPHY; RESIST SPRAY COATING; SPRAY FLOW;

SPRAYED COATINGS;

EID: 3142536912     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.2387     Document Type: Conference Paper

References (17)

1. S. Linder, H. Baltes, F. Gnaedinger and E. Doering: Proc. Int. Workshop Micro Electro Mechanical Systems (1996) p. 38.
2. P. Kersten, S. Bouwstra and J. W. Petersen: Sens. & Actuat. A51 (1995) 51.
3. M. Heschel and S. Bouwstra: Sens. & Actuat. A70 (1998) 75.
4. S. Babin and H. W. P. Koops: J. Vac. Sci. & Technol. B 14 (1996) 3860.
5. M. Sasaki, S. Nogawa and K. Hane: Trans. IEE Jpn. 122-E (2002) 235 [in Japanese].
6. M. Sasaki, T. Ando, S. Nogawa and K. Hane: Jpn. J. Appl. Phys. 41 (2002) 4350.
7. M. Sasaki, T. Yamaguchi, J. H. Song, K. Hane, M. Hara and K. Hori: J. Lightwave Technol. 21 (2003) 602.
8. N. P. Pham, T. L. M. Scholtes, R. Klerk, B. Wieder, P. M. Sarro and J. N. Burghartz: Proc. SPIE 4557 (2001) 312.
9. A. Kado, T. Sakai and Y. Matsumoto: Proc. 19th Sensor Symp. (2002) p. 347.
10. W. J. Li, J. D. Mai and C. M. Ho: Proc. Int. Workshop Micro Electro Mechanical Systems (1998) p. 268.
11. V. K. Singh, M. Sasaki, J. H. Song and K. Hane: Jpn. J. Appl. Phys. 42 (2003) 4027.
12. V. K. Singh, M. Sasaki, J. H. Song and K. Hane: Proc. Int. Conf. Solid-State Sensors and Actuators (2003) p. 817.
13. J. B. McLaughlin: Phys. Fluids A1 (1989) 1211.
14. R. Kurose, H. Makino and S. Komori: J. Soc. Powder Technol. Jpn. 39 (2002) 353 [in Japanese].
15. J. B. McLaughlin: J. Fluid Mech. 224 (1991) 261.
16. A. C. K. Lai, M. A. Byrne and A. J. H. Goddard: J. Aerosol Sci. 30 (1999) 1201.
17. J. W. Brooke, K. Kontomaris, T. J. Hanratty and J. B. Mclaughlin: Phys. Fluids A4 (1992) 825.