Experimental evidences for two paths in the dissolution process of B clusters in crystalline Si

Applied Physics Letters

Volumn 87, Issue 22, 2005, Pages 1-3

  De Salvador, D ^a   Napolitani, E ^a   Bisognin, G ^a   Carnera, A ^a   Bruno, E ^b   Mirabella, S ^b   Impellizzeri, G ^b   Priolo, F ^b  

^a UNIVERSITY OF PADOVA   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ANNEALING; CONCENTRATION (PROCESS); CRYSTALLOGRAPHY; SEMICONDUCTING SILICON; SOLUBILITY;

CLUSTERS; CRYSTALLINE SI; DISSOLUTION PATHS; SOLUBILITY LIMITS;

DISSOLUTION;

EID: 27944468221     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2126128     Document Type: Article

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