Progress of wear properties on micro-electro-mechanical systems

Mocaxue Xuebao/Tribology

Volumn 25, Issue 5, 2005, Pages 489-494

  Zhang, Wen Ming ^a   Meng, Guang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

MEMS; Surface modification; Wear behavior

Indexed keywords

COATINGS; LUBRICANTS; MICROELECTROMECHANICAL DEVICES; ROTATING MACHINERY; SURFACE ROUGHNESS;

LOADINGS; MATERIAL PROPERTIES; MICRO ROTATING MACHINES; MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); WEAR BEHAVIOR; WORKING CONDITIONS;

WEAR OF MATERIALS;

EID: 27844580787     PISSN: 10040595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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