Friction and wear of rotating pivots in MEMS and other small scale devices

Wear

Volumn 250-251, Issue PART 2, 2001, Pages 965-972

  Williams, J A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Friction; MEMS; Wear

Indexed keywords

FRICTION; MACHINE DESIGN; TRIBOLOGY; WEAR OF MATERIALS;

MOVING MECHANICAL ASSEMBLIES (MMA);

MICROELECTROMECHANICAL DEVICES;

FRICTION; MICROELECTRONICS; PIVOT; TRIBOLOGY; WEAR;

EID: 18244414565     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0043-1648(01)00720-7     Document Type: Article

References (14)

1. Tribological behavior of polycrystalline and single-crystal silicon
2. Advantages and limitation of silicon as a bearing materials for MEMS applications
3. Effect of wear on pivot thrust bearings
4. Mechanical factor of merit with respect to electrical instruments
5. Micro/nanotribology and the micro/nanomechanics of MEMS devices
6. Sliding contact stress field due to a spherical indenter on a layered elastic half-space
7. Contact mechanics of rough surfaces in tribology: Single asperity contact
8. Microfabrication technologies for high performance micro-actuators
9. In-situ friction and wear measurements in integrated poly-silicon mechanisms
10. Measurements of wear in polysilicon micro-motors to MEMS
11. Wear at microscopic scales and light loads for MEMS applications
12. A study on wear on MEMS contact morphologies
13. The tribological behaviour of diamond coatings