Electrostatic comb drive for vertical actuation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3224, Issue , 1997, Pages 109-119

  Lee, Abraham P ^a   McConaghy, Chuck F ^a   Krulevitch, Peter A ^a   Campbell, Eugene W ^a   Sommargren, Gary E ^a   Trevino, Jimmy C ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Electrostatic comb drive; Interferometry; Vertical actuation; Vertical position control

Indexed keywords

COMB FINGERS; DESIGN GUIDELINES; DISPLACEMENT CURVES; ELECTROSTATIC COMB DRIVE; EQUILIBRIUM POSITIONS; EXPERIMENTAL VERIFICATIONS; FLEXURE STIFFNESSES; GRAVITY FORCES; IN-SITU; LEVITATION EFFECTS; PARALLEL PLATES; PHASE SHIFTING; POLYSILICON COMBS; SENSING TECHNIQUES; SQUEEZE FILMS; SUSPENDED MASSES; THEORETICAL CALCULATIONS; VERTICAL ACTUATION; VERTICAL MOVEMENTS; VERTICAL POSITION CONTROL;

ACTUATORS; APPLICATIONS; DRIVES; ELECTROSTATICS; EXPERIMENTS; GRAVITATION; INTERFEROMETERS; INTERFEROMETRY; MICROACTUATORS; OPTICAL DEVICES; POLYSILICON; POSITION CONTROL; SENSORS; SUBSTRATES;

ELECTROSTATIC DEVICES;

EID: 0011587110     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284506     Document Type: Conference Paper

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