Bipolar-compatible epitaxial poly for smart sensors: Stress minimization and applications

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 636-645

  Gennissen, Paul T J ^a,b   Bartek, M ^a   French, Paddy J ^a   Sarro, Pasqualina M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b EG&G   (United States)

Author keywords

Bipolar compatible epitaxial polysilicon; Micromachining; Smart sensors

Indexed keywords

EPITAXIAL GROWTH; ION IMPLANTATION; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROMACHINING; OXIDATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; STRAIN; STRESSES;

BIPOLAR COMPATIBLE EPITAXIAL POLYSILICON; SMART SENSORS;

SILICON SENSORS;

EID: 0031175915     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01498-2     Document Type: Article

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