Single crystal silicon (SCS) micromirror arrays using deep silicon etching and IR alignment

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 441-448

  Lee, Chris S B ^a   Webb, Russell Y ^a   Chong, John M ^a   MacDonald, Noel C ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ETCHING; INFRARED RADIATION; MIRRORS; OPTICAL DESIGN; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

INFRARED ALIGNMENT; MICROMIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033727390     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)