A micromachined Kelvin probe with integrated actuator for microfluidic and solid-state applications

Journal of Microelectromechanical Systems

Volumn 14, Issue 4, 2005, Pages 691-698

  Chu, Larry L ^a,b,c   Takahata, Kenichi ^b,d   Selvaganapathy, Ponnambalam Ravi ^b,e   Gianchandani, Yogesh B ^b   Shohet, J Leon ^f  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

^c Colibrys Inc ^*  (United States)

^d 3M COMPANY   (United States)

^e MCMASTER UNIVERSITY   (Canada)

^f University of Wisconsin Madison   (United States)

Author keywords

Contact potential; Oxide charge; PH; Surface potential

Indexed keywords

ELECTRIC DISCHARGE MACHINING; FLUIDIC DEVICES; MICROACTUATORS; PH; PROBES; SILICA; VOLTAGE MEASUREMENT;

CONTACT POTENTIAL; KELVIN PROBE; MICROFLUIDIC CHANNEL; OXIDE CHARGE; SURFACE POTENTIAL;

MICROELECTROMECHANICAL DEVICES;

EID: 27144520582     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.845453     Document Type: Article

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