A micromachined Kelvin probe for surface potential measurements in microfluidic channels and solid-state applications

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 384-387

  Chu, L L ^a,b   Takahata, K ^a   Selvaganapathy, P ^a   Shohet, J L ^b   Gianchandani, Y B ^a,b  

^a The Department of Civil and Environmental Engineering   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

Contacts; Kelvin; Machining; Manufacturing processes; Microelectronics; Microfluidics; Monitoring; Plugs; Probes; Solid state circuits

Indexed keywords

ACTUATORS; CONTACTS (FLUID MECHANICS); FLUIDIC DEVICES; MACHINING; MANUFACTURE; MICROELECTRONIC PROCESSING; MICROELECTRONICS; MICROFLUIDICS; MICROSYSTEMS; MONITORING; PROBES; SUBSTRATES; SURFACE POTENTIAL; TRANSDUCERS;

CONTACT POTENTIAL DIFFERENCE; KELVIN; MANUFACTURING PROCESS; MICRO ELECTRO-DISCHARGE MACHINING; MICROELECTRONICS MANUFACTURING; PLUGS; SOLID-STATE CIRCUITS; SURFACE POTENTIAL MEASUREMENTS;

SOLID-STATE SENSORS;

EID: 84944720999     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215334     Document Type: Conference Paper

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