Bi-directional movable latching structure using electrothermal V-beam actuators for optical switch application

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 149-150

  Chen, Wen Chih ^a   Wu, Chia Yu ^a   Lee, Chengkuo ^a  

^a ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

Author keywords

Actuators; Bidirectional control; Electrothermal effects; Micromechanical devices; Optical bistability; Optical design; Optical switches; Particle beam optics; Relays; Springs

Indexed keywords

ACTUATORS; ELECTRIC HEATING; MOEMS; OPTICAL BISTABILITY; OPTICAL DESIGN; SPRINGS (COMPONENTS);

BI-DIRECTIONAL; BIDIRECTIONAL MOTION; ELECTRO-THERMAL EFFECTS; ITS APPLICATIONS; MICROMECHANICAL DEVICE; PARTICLE BEAM OPTICS; RELAYS; V-BEAM ACTUATOR;

OPTICAL SWITCHES;

EID: 23944443590     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233510     Document Type: Conference Paper

References (9)

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