Development of electrothermal actuator with optimized motion characteristics

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 6 B, 2003, Pages 4067-4073

  Lai, Yen Jyh ^a   Lee, Chengkuo ^a   Wu, Chia Yu ^a   Chen, Wen Chih ^a   Chen, Chihchung ^a   Lin, Yu Shen ^a   Fang, Weileun ^b   Huang, Ruey Shing ^b  

^a ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Electrostatic force; Electrothermal actuator; MEMS; Stiction

Indexed keywords

CAPACITORS; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; POLYSILICON;

ELECTROTHERMAL ACTUATORS;

ACTUATORS;

EID: 0042362170     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.4067     Document Type: Conference Paper

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