Molecular dynamics simulation of the thermal spike in amorphous carbon thin films

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 921-927

  Pearce, G K ^a   Marks, N A ^a   McKenzie, D R ^a   Bilek, M M M ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

Amorphous carbon; Ion beam deposition; Simulation; Stress

Indexed keywords

ALGORITHMS; AMORPHOUS MATERIALS; COMPUTER SIMULATION; DIAMOND LIKE CARBON FILMS; ION BEAM ASSISTED DEPOSITION; ION BOMBARDMENT; MOLECULAR DYNAMICS; STRESSES;

AMORPHOUS CARBON; ENVIRONMENT DEPENDENT INTERACTION POTENTIAL (EDIP); ION BEAM DEPOSITION; THERMAL SPIKE;

THIN FILMS;

EID: 18444418888     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.12.042     Document Type: Conference Paper

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