New shrinkage technology for nano-contact hole formation

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5753, Issue I, 2005, Pages 181-186

  Lee, Geunsu ^a   Park, Jungwoo ^a   Lee, Wonwook ^a   Bok, Cheolkyu ^a   Lim, Changmoon ^a   Moon, Sungchan ^a  

^a Hynix Semiconductor Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; PATTERN RECOGNITION; POLYMERS; REDUCTION; SHRINKAGE; THERMAL EFFECTS;

AGGRESSIVE REDUCTION; COST-EFFECTIVE SHRINKAGE TECHNIQUE; NON-CONTACT HOLES; POLYMER COATS;

NANOSTRUCTURED MATERIALS;

EID: 24644490527     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.598592     Document Type: Conference Paper

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