Thermal oxidation of 6H-SiC studied by oxygen isotopic tracing and narrow nuclear resonance profiling

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 914-918

  Trimaille, Isabelle ^a   Ganem, Jean Jacques ^a   Vickridge, Ian C ^a   Rigo, Serge ^a   Battistig, Gabor ^b   Szilagyi, Edit ^c   Baumvol, Israel J ^d   Radtke, Claudio ^d   Stedile, Fernanda C ^d  

^a CNRS   (France)

^b INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^c WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

^d FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

Author keywords

Atomic transport; Narrow nuclear resonance; NRP; Oxidation; SiC; Silicon carbide; SiO2

Indexed keywords

CARBON MONOXIDE; INTERFACES (MATERIALS); NATURAL FREQUENCIES; NUCLEAR MAGNETIC RESONANCE; OXIDATION; PRESSURE EFFECTS; THERMOOXIDATION;

ATOMIC TRANSPORT; NARROW NUCLEAR RESONANCE; NRP; SIO2;

SILICON CARBIDE;

EID: 2442621067     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.187     Document Type: Conference Paper

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