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Volumn 3878, Issue , 1999, Pages 365-374
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Optical binary switch and amplitude modulator micromirror arrays
a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
AMPLITUDE MODULATION;
COMPUTER SIMULATION;
ELECTROSTATIC DEVICES;
FINITE ELEMENT METHOD;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
MIRRORS;
NATURAL FREQUENCIES;
BINARY OPTICAL SWITCHES;
MICROMIRROR ARRAYS;
POLYSILICON;
OPTICAL SWITCHES;
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EID: 0033338614
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (2)
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References (18)
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