Thermally actuated piston micromirror arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3131, Issue , 1997, Pages 260-271

  Cowan, William D ^a   Bright, Victor M ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Actuators; Micro electro mechanical systems; Micro opto electro mechanical systems; Micromirrors

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; DEFLECTION (STRUCTURES); DESIGN; ELECTROSTATIC DEVICES; ELECTROSTATICS; IMAGING SYSTEMS; INTERFEROMETERS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL DEVICES; OPTICAL SWITCHES; POLYSILICON; RADAR; SCANNING; VACUUM;

DRIVE POWER; DRIVE VOLTAGES; LARGE ARRAYS; LASER INTERFEROMETERS; MICRO-ELECTRO-MECHANICAL SYSTEMS; MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS; MICROMIRROR ARRAY (MMA); MICROMIRRORS; POLYSILICON SURFACE MICROMACHINING; POWER DISSIPATIONS; POWER REDUCTIONS; TEST RESULTS; VACUUM CHAMBERS;

FREQUENCY RESPONSE;

EID: 1242304369     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.277757     Document Type: Conference Paper

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