Modeling and measurement of electrostatic micro mirror array fabricated with single layer polysilicon micromachining technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3513, Issue , 1998, Pages 59-70

  Min, Young Hoon ^a   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; LIGHT MODULATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHASE MODULATION; RESIDUAL STRESSES;

STRESS GRADIENTS;

MIRRORS;

EID: 0032305556     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)