Surface micromachined segmented mirrors for adaptive optics

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 5, Issue 1, 1999, Pages 90-101

  Cowan, William D ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Adaptive optics; Beam steering; Deformable mirrors; Microelectromechanical systems (mems); Micromirrors

Indexed keywords

ABERRATIONS; ADAPTIVE OPTICS; ARRAYS; COST EFFECTIVENESS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYCRYSTALLINE MATERIALS; SILICON; SURFACE TREATMENT;

DEFORMABLE MIRRORS; DIGITAL DEFLECTION MICROMIRRORS;

MIRRORS;

EID: 0032681841     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.748110     Document Type: Article

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