Significant resonance characteristic improvements by combined use of thermal annealing and Co electrode in ZnO-based FBARs

Electronics Letters

Volumn 39, Issue 23, 2003, Pages 1638-1640

  Yim, Munhyuk ^a   Kim, Dong Hyun ^a   Chai, Dongkyu ^a   Yoon, Giwan ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COBALT; DIELECTRIC MATERIALS; ELECTRODES; NATURAL FREQUENCIES; RESONANCE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE STRUCTURES; ZINC OXIDE;

FILM BULK ACOUSTIC RESONATOR; THERMAL ANNEALING;

ACOUSTIC RESONATORS;

EID: 0344550332     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20031029     Document Type: Article

References (7)

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2. Lakin, K.M., McCarron, K.T., and Rose, R.E.: 'Solidly mounted resonators and filters'. IEEE Ultrasonics Symp., Cannes, France, 1995, pp. 905-908
3. Newell, W.E.: 'Face-mounted piezoelectric resonators', Proc. IEEE, 1965, 53, pp. 575-581
4. Pinkett, S.L., and Hunt, W.D.: 'Temperature characteristics of ZnO-based thin film bulk acoustic wave resonators'. IEEE Ultrasonics Symp., Atlanta, GA, USA, 2001, pp. 823-826
5. 2 multilayer reflector', Electron. Lett., 2000, 36, pp. 1435-1438
6. Lakin, K.M., et al.: 'Improved bulk wave resonator coupling coefficient for wide bandwidth filters'. IEEE Ultrasonics Symp., Atlanta, GA, USA, 2001, pp. 827-831
7. Lakin, K.M., Kline, G.R., and McCarron, K.T.: 'High-Q microwave acoustic resonators and filters', IEEE Trans. Microw. Theory Tech., 1993, 41, p. 2139