Fabrication of 5GHz band film bulk acoustic wave resonators using ZnO thin film

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2003, Pages 166-169

  Kubo, Ryuichi ^a   Fujii, Hidetoshi ^a   Kawamura, Hideki ^a   Takeuchi, Masaki ^a   Inoue, Kazuhiro ^a   Yoshino, Yukio ^a   Makino, Takahiro ^a   Arai, Seiichi ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ANISOTROPY; BANDWIDTH; COUPLED CIRCUITS; CRYSTAL FILTERS; ELECTROMECHANICAL DEVICES; ELECTRON BEAMS; EVAPORATION; HARMONIC ANALYSIS; LOCAL AREA NETWORKS; MOBILE TELECOMMUNICATION SYSTEMS; RESONATORS; THIN FILMS; ZINC COMPOUNDS;

BULK ACOUSTIC WAVES (BAW); ELECTROMECHANICAL COUPLING; ELECTRON BEAM (EB) EVAPORATION; FILM BULK ACOUSTIC WAVE RESONATORS;

ACOUSTIC WAVES;

EID: 4143085084     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Y. Yoshino, N. Tsukai, K. Inoue, M. Takeuchi, T. Makino, S. Arai, "Effect of Buffer Electrodes in Crystallization of Zinc Oxide Thin Film for Thin Film Bulk Acoustic Wave Resonator", Mat. Res. Soc. Symp. Proc., 605, 267(2000)
2. K. M. Lakin, J.Belsick, J. F. McDonald, K. T. McCarron, "Improved Bulk Wave Resonator Coupling Coefficient For Wide Bandwidth Filters", IEEE Ultrasonics Symp., Proc., 827(2001)
3. M. Takeuchi, K. Inoue, Y. Yoshino, K. Ohwada, "Improvement of Thickness Distribution and Crystallinity of ZnO Thin Films Prepared by Radio Frequency Planer Magnetron Sputtering", Vacuum, 51-4,565(1998)
4. Y. Yoshino, "Transversal Type Piezoelectric Resonator Using ZnO Thin Film on Micro-Fabricated Elinver (Fe-Ni-Cr-Ti) Alloy", Mat. Res. Soc. Symp. Proc., 518, 9(1998)
5. T. Nishihara, T. Yokoyama, T. Miyashita, U. Satoh, "High Performance and Miniature Thin Film Bulk Acoustic Wave Filters for 5GHZ", IEEE Ultrasonics Symp., Proc., 944(2002)