A novel method for determining Young's modulus of thin films by micro-strain gauges

Microsystem Technologies

Volumn 11, Issue 2-3, 2005, Pages 151-157

  Pan, Chi Hsiang ^a  

^a NATIONAL CHIN YI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; MICROMACHINING; POLYCRYSTALLINE MATERIALS; PRESSURE EFFECTS; RESIDUAL STRESSES; SILICON NITRIDE; STRAIN GAGES;

LOW-PRESSURE CHEMICAL-VAPOR DEPOSITION (LPCVD); MICRO-STRAIN GAGES; SEMICONDUCTOR RESEARCH CENTER (SRC); TEST STRUCTURE;

THIN FILMS;

EID: 24044549737     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0469-1     Document Type: Article

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